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TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly No Cables Lithius Items are sold with aTEL Tokyo Electron 5087 400391 12 ARM R COT Scan Assembly No Cables Lithius Inventory # A 18746 Part No: 5087 400391 12 Model No: SCAN ASSY ARM R COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components Sanyo Denki Stepping Motor Part No: 103H7851 70E1, StepSyn SMC Linear Actuator Part No: LG 96A A1 Parts List (approximation, parts may vary) Assembly Part No: 5087 400391 12 SCAN ASSY 5024 000118 11