Prometrix 54-0279 VTF Position Sensor PCB 36-0279 KLA-Tencor New Surplus Unit powers on and functions

Unit powers on and functions but gives alarm

Model No: BEAMLINE VACUUM SYSTEM

Part No: 1970001102 Rev A

Part No: 4S065-531

Prometrix 54-0279 VTF Position Sensor PCB 36-0279 KLA-Tencor New Surplus Unit powers on and functionsPrometrix 54 0279 VTF Position Sensor PCB 36 0279 KLA Tencor New Surplus Part No: 54 0279 Model No: VTF POS SENSOR Rev. B 36 0279 This Prometrix 54 0279 VTF Position Sensor PCB is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 10"x10"x10" @ 8 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in